Overview
High quality ultrathin films are being produced in bulk for demanding coating applications such as smart screens, drug eluting stents, fuel cells and electronic devices. One effective method for producing quality ultra-thin coating is by way of ultrasonic nozzle spray coating. MIMOS working with a local micro-dispenser equipment manufacturer have realized an industry grade automated ultrasonic spray coater with high throughput targeted for electronic applications.
Mi-Atomizer is a commercial ultrasonic coater, a result of
MIMOS collaboration with a local microdispensing equipment
manufacturer. It is used for ultrathin coating applications down to a few nanometers thick. The robotic handling of the ultrasonic nozzle enables fast coating process of nanomaterials onto large substrates. Currently made for 2D coating applications using proprietary nanomaterials, the equipment is able to coat highly uniform layer almost 2nm thick over an 8-inch silicon wafer. Due to possible toxic nature of nanomaterials, the equipment is built with efficient exhaust and safety features.
Technology Summary
Mi-Atomizer
A highly efficient, accurate, programmable, user-friendly ultrathin coating equipment for various nanomaterial deposition applications.
Industries: Electronic, Energy, Medical, Textile, Automotive,
Telecommunications
Features
- Mainframe and handler
- Spray coater
- Built-in safety features
Technology Benefits
- User-friendly programmable operation
- Reproducible coating materials
- High quality uniform coating
- High efficiency spraying
Mi-Atomizer solution comprises the following features:
Features
- Mainframe and Handler
Aluminum mainframe
Programmable spraypath and robotic arm Heated and vacuum sample holder
Spray height (Z): 0 to 150mm
Z travel resolution: 10um
Max XY travel: 400mm x 400mm Max XY speed: 800mm/s
Waste bin for setup purposes - Spray Coater
10% resistance uniformity @ 15nm thick
Minimum ~2nm coating thickness
120 kHz spraynozzle - Built-In Safety Features
Fully sealed enclosure when operating
Transparent front cover with safety lock
Exhaust system
Heater safety control
Technology Benefits
- The main impacts of Mi-Atomizer solution are:
User-Friendly Programmable Operation
Allows setting for different thickness and coating morphology - Reproducible Coating Materials
Various customised coating materials allowed. - High Quality Uniform Coating
Non-clogging highly uniform droplet distribution reduces coating imperfection. - High Efficiency Spraying
Highly efficient spraying reduces material usage
